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Unveiling piezo-mems dynamics with interferometric eyes
Settembre 25 @ 15:30 - 17:00
Giovedì 25 settembre si terrà un seminario presso l’aula Grandori (Edificio 4 – piano seminterrato) alle ore 15:30 dal titolo “Unveiling piezo-mems dynamics with interferometric eyes”.
Il seminario sarà tenuto dalla Prof.ssa Sabina Merlo, Università degli Studi di Pavia.
Abstract
Piezo-MEMS speakers based on the inverse piezo-electric effect are becoming increasingly attractive thanks to their low power consumption and are good candidates for miniaturized devices for smart-phones and in-ear audio systems. Piezo-actuated tunable microlenses are also of great interest in various miniaturized systems. In this seminar, I will illustrate the functionality of laser diode feedback interferometry, or self-mixing interferometry, for analyzing the out-of-plane vibration performance of a commercial piezo-MEMS speaker, showing the advantages with respect to a classical Michelson scheme. Characterization of the quasi-static behavior of a tunable microlens by means of low-coherence interferometry will be illustrated, as another example of application of spot-optical techniques for MEMS testing.
Piezo-MEMS speakers based on the inverse piezo-electric effect are becoming increasingly attractive thanks to their low power consumption and are good candidates for miniaturized devices for smart-phones and in-ear audio systems. Piezo-actuated tunable microlenses are also of great interest in various miniaturized systems. In this seminar, I will illustrate the functionality of laser diode feedback interferometry, or self-mixing interferometry, for analyzing the out-of-plane vibration performance of a commercial piezo-MEMS speaker, showing the advantages with respect to a classical Michelson scheme. Characterization of the quasi-static behavior of a tunable microlens by means of low-coherence interferometry will be illustrated, as another example of application of spot-optical techniques for MEMS testing.
Speaker’s bio
Sabina Merlo received in 1987 the master’s degree and in 1991 the Ph.D. degree, both in electronic engineering, from the University of Pavia. She also received the M.S.E. degree in bioengineering from the University of Washington, Seattle, USA, in 1989, thanks to a Rotary Foundation Graduate Scholarship. Assistant Professor since 1993 and Associate Professor since 2001, she is now Full Professor of Electrical and electronic measurements since 2018 at the Department of Electrical, Computer and Biomedical Engineering, University of Pavia.
She is president of the Teaching council of Information Engineering at the University of Pavia and Vice-President of the “Distretto della Microelettronica Pavese” recognized as Ecosystem for Microelectronics of the Italian Lombardy region.
Her research interests include applications of photonics techniques for the measurement of physical and chemical parameters, optical testing of MEMS/MOEMS and microfluidic devices, interferometry, optical chemical sensing and other photonic applications. She has collaborated with STMicroelectronics on MEMS/MOEMS since the very beginning of the company activity in this field (2000). She holds four patents and is the author of more than 200 publications in journals, books, and conference proceedings. She was an Associate Editor of IEEE/ASME JMEMS until 2024, she is now an Associate Editor of MDPI Sensors and MDPI Micromachines.